*========================================================================* | I O N | *------------------------------------------------------------------------* | News and views within the Ion Beam Community | *========================================================================* | Authors bear full responsibility for their contributions | *========================================================================* I O N Friday, 25 April 1997 Vol. 97 : Num. 003 Chris Jeynes : Goniometer specification for new IBA machine ---------------------------------------------------------------------- From: Chris Jeynes Date: Thu, 24 Apr 1997 16:15:28 +0100 Subject: Chris Jeynes : Goniometer specification for new IBA machine FROM UNIVERSITY OF SURREY We are in the market for a new IBA target chamber and goniometer suitable for RBS-channelling, PIXE, ERD, and possibly gamma ray NRA. We invite anyone with instruments available which satisfy the following minimum specification to let us know. We are particularly interested in the goniometer, but some instruments are integral with the target chamber for charge collection purposes. We are keen to consider high specification instruments. If you know anyone who could make us such an instrument we would also be very grateful for that information. We require: a target chamber to accomodate the goniometer (below) with: vacuum 1e-7 mbar or better sufficient ports for IBA detectors: at least 2 particle (RBS) detectors, an ERD detector, a PIXE detector (and possibly a NaI gamma detector?). Space for ToF telescope a sample plate exchange airlock system is desirable good system charge collection, better than 2% a goniometer with: at least 2 rotation axes of angular resolution at least 0.2degrees and preferably 0.1degrees or better. at least one axis to scan at least +-90 degrees (for ERD and high resolution RBS). three axes are preferred, to facilitate multiple axis channelling and angular scans, and for separate control of the beam and detector angles to the sample. a well defined eucentric point of the rotation axes at least one translation axis moving the samples relative to the eucentric point. Two such axes in the sample plane would be preferred. A further axis normal to the sample plane (to allow for sample thickness in glancing incidence work) would be desirable. The translations in the sample plane sufficient to permit mapping of at least a 50mm*50mm sample, but we would like to map 200mm diameter wafers. Geometry allowing transmission of beam is desirable Full computer control Replies to: Prof.Brian J.Sealy, Director Ion Beam Facility for Microelectronics University of Surrey Guildford, England GU2 5XH tel: (44) 1483 259139 fax: (44) 1483 534139 b.sealy@surrey.ac.uk END Dr.C.Jeynes, Senior Liaison Fellow University of Surrey Ion Beam Facility for Microelectronics School of Electronic Engineering, Information Technology and Mathematics Guildford, GU2 5XH; England tel (direct): +44 1483 259829 fax (direct): +44 1483 259391 Mrs.K.E.M.Arthur (Facility Secretary): +44 1483 259824 University Switchboard: +44 1483 300800 ------------------------------ End of I O N V97 #3 ******************* *-----------------------------------------------------------------------* | I O N - part of the IBIS, the Ion Beam Information System | *-----------------------------------------------------------------------* | Editors: | | E. Szilagyi (szilagyi@rmki.kfki.hu) | | G. Battistig (battisti@ra.atki.kfki.hu) | | Z. Hajnal (hajnal@sunserv.kfki.hu) | | | | Contributions to ION: ion@sunserv.kfki.hu | | | | For more info mail to: ion-request@sunserv.kfki.hu | | with a single word in the mail body: INFO | | | | IBIS is now available on-line at http://www.kfki.hu/~ionhp/ | *-----------------------------------------------------------------------*