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DEPTH (Windows version)

by E. Szilágyi

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DEPTH code [5] has now been developed further to calculate the energy and depth resolution of ion beam analysis methods as Rutherford backscattering spectrometry, Elastic recoil detection analysis. In this version Nuclear Reaction Analysis is not included.

The depth resolution part practically is the same than it was at the DOS version (as shown in Fig.1).

The spectrum simulation part has been improved significantly. Spectrum simulation with atomic resolution can be performed using a magnetic spectrograph (see Fig. 2, details are in ref 14.


Figure 1. Comparison of depth and energy resolution calculated by the DOS and Windows version for 1.6 MeV He ERD in SiH.


Figure 2. Spectrum simulation with monolayer resolution. a) for spectrum constructions the energy losses of the carbon planes and the elastic scattering cross section have to be calculated and the energy spread contributions as a function of depth (i.e., as a function of detected energy) have to be taken into account. b) Simulated energy spectrum compared to the measured one [G. Dollinger, C.M. Frey, A. Bergmaier, T. Faestermann, Nucl. Instr. and Meth. B 136-138 (1998) 603.]. All the energy spread effects accounted for. c) Simulated energy spectrum taking into account only the intrinsic energy spread contributions compared to the same experimental spectrum as in b). The simulated spectra were normalised to the experimental one between 18200 and 18250 keV.

Related publications:

1.      F. Pászti, E. Szilágyi, E. Kótai:

Optimization of the depth resolution in elastic recoil detection

Nucl. Instr. Meth. B 54 (1991) 507 - 512.

2.      N.P. Barradas, J.C. Soares, M.F. da Silva, E. Szilágyi, F. Pászti:

Study of multilayer interface roughness using RBS with improved depth resolution

Nucl. Instr. Meth. B 94 (1994) 266 - 270.

3.      E. Szilágyi, F. Pászti:

Theoretical calculation of the depth resolution of IBA methods

Nucl. Instr. Meth. B 85 (1994) 616 - 620.

4.      E. Szilágyi, F. Pászti, V. Quillet, F. Abel:

Optimization of the depth resolution in ERDA of H using 12C ions

Nucl. Instr. Meth. B 85 (1994) 63 - 67.

5.      E. Szilágyi, F. Pászti, G. Amsel:

Theoretical approximations for depth resolution calculations in IBA methods

Nucl. Instr. Meth. B 100 (1995) 103 - 121.

6.      E. Szilágyi, L.S. Wielunski, F. Pászti:

Theoretical Approximation of Energy Distribution of Elastically Recoiled Hydrogen Atoms

Nucl. Instr. Meth. B 136-138 (1998) 701 - 706.

7.      L.S. Wielunski, E. Szilágyi, G.L. Harding:

Multiple Scattering Effects in Elastic Recoil Detection Depth Resolution

Nucl. Instr. Meth. B 136-138 (1998) 713 - 718.

8.      E. Szilágyi:

Energy spread in ion beam analysis

Nucl. Instr. Meth. B 161-163 (2000) 37 - 47.

9.      E. Szilágyi:

On the limitations introduced by energy spread in elastic recoil detection analysis

Nucl. Instr. Meth. B 183 (2001) 25 - 33.

10.  E. Szilágyi, E. Kótai, Z. Zolnai, G. Battistig, T. Lohner, J. Gyulai:

Ion implantation induced damage in silicon carbide studied by non-Rutherford elastic backscattering

2000 International Conference on Ion Implantation Technology (IIT'2000) Proceedings, Alpbach, Austria, 17-22 September 2000, (Eds.: H. Ryssel, L. Frey, J. Gyulai, H. Glawishing), IEEE 00EX432, ISBN 0-7803-6462-7, 2000, pp.131-134.

11.  E. Szilágyi, N.Q. Khánh, Z.E. Horváth, T. Lohner, G. Battistig, Z. Zolnai, E. Kótai, J. Gyulai:

Ion Bombardment Induced Damage in Silicon Carbide Studied by Ion Beam Analytical Methods

Mater. Sci. Forum 353-356 (2001) 271 - 274.

12.  L.S. Wielunski, D. Grambole, U. Kreissig, R. Grötzschel, G. Harding, E. Szilágyi:

Hydrogen depth resolution in multilayer metal structures, comparison of elastic recoil detection and resonant nuclear reaction method

Nucl. Instr. Meth. B 190 (2002) 693 - 698.

13.  E. Rauhala, N.P. Barradas, S. Fazinic, M. Mayer, E. Szilágyi, M. Thompson:

Status of ion beam data analysis and simulation software

Nucl. Instr. Meth. B 244 (2006) 436 - 456.

14.  N.P. Barradas, K. Arstila, G. Battistig, M. Bianconi, N. Dytlewski, C. Jeynes, E. Kótai, G. Lulli, M. Mayer, E. Rauhala, E. Szilágyi, M. Thompson:

International Atomic Energy Agency intercomparison of Ion Beam Analysis software

Nucl. Instr. and Meth. in Phys. Res. B (2007) 281-303.

download WDEPTH.ZIP (Last modification: 27.08.2007) This version was used in IAEA intercomparison of IBA software.